Silicon Technologies: Ion Implantation and Thermal Treatment (Iste Book 507) by Annie Baudrant

Silicon Technologies: Ion Implantation and Thermal Treatment (Iste Book 507)

Annie Baudrant
499 pages
Wiley-ISTE
Feb 2013
Hardcover
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The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
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About this book
Pages 499
Publisher Wiley-ISTE
Published 2013
Readers 0